vertical fluidized bed tube furnace suitable
Products Description
It is a vertical fluidized bed tube furnace suitable for CVD processes of powder materials (FBCVD) with a porous quartz plate with a pore size of 5-15 μm. The powder can be placed on a porous quartz plate, and the gas is passed through the lower end of the furnace tube, through which the sample particles are suspended in the heated area for deposition experiments.
Fluidized Bed Tube Furnace Feature:
● The solid particles are suspended in the heating zone by the bottom flowing gas;
● PID automatic control and auto-tune function.
● Intelligently programmable controller, Set program freely;
● Different chamber size can be customized.
● It can provide good heat conduction and uniform wrapping of the particle surface;
● Split type furnace body is convenient for taking out furnace tube and taking and placing the granular materials;
Fluidized Bed Tube Furnace Technical Parameters
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Furnace Shell Structure: |
Double-layer carbon steel or Stainless steel plate shell, surface sprayed with heat resistant plastic powder coating to ensure that the outer surface temperature of the furnace is ≤40.C ; |
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Chamber Materials: |
High-grade alumina fiber ceramic board and thermal insulation cotton. |
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Furnace Body : |
Split type ; |
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Max. Temperature: |
1200.C |
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Continuous Working temperature: |
500.C/ 900.C / 1100.C optional ; |
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Heating Element: |
Fe-Cr-Al alloy resistance wires |
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Thermocouple Type: |
K type |
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Rated voltage & Power: |
AC 110V/220V 50/60Hz; Power depend on chamber size. |
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Furnace Tube: |
stainlesss steel tube / quartz tube are optional; Tube OD40/ 60 /80 /100 /120mm or bigger are available. Heating zone 200mm / 350mm / 400mm/600mm optional, bigger size is available. |
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Heating Rate: |
0-30.C /min, Suggest to use 10-15.C/min ; |
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Temperature Precision: |
±1.C ; |
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Temperature Controller: |
Temp. Controller with 1 program storage capacity and 30 segments ramp & dwell; PID automatic control and auto-tune function. Built in protection for over-heating and broken thermocouple. |
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Optional parts: |
Ultrasonic nebulizer, multi-channel proton mixing gas supply system, float gas supply system, oxygen analyzer; Touch screen controller, paperless recorder, Remote communication control system, Exhaust gas treatment device ; |
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Warranty |
One year limited warranty with lifetime support, excluding heating element, cooling fans, thermocouple and ceramic tube damaged by user. Attention: Any damages caused by the use of corrosive and acidic gases, and any damage from wrong operate and use are not under the coverage of One Year Limited Warranty. |
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Standard Accessories:
Door block 1set, vacuum pump 1pc, crucible tongs 1pc, Thermal gloves 1 pair, Operation manual 1pc.
Fluidized Bed Tube Furnace Using Note :
1. The air pressure inside the furnace tube should not exceed 0.02Mpa;
2. Due to the high internal pressure of the gas cylinder, when introducing gas into the furnace tube, a pressure reducing valve must be installed on the gas cylinder. The range of the pressure reducing valve is 0.01Mpa -0.1Mpa, which will be more precise and safe to use.
3. When the temperature of the furnace body exceeds 1000 ° C, the furnace tube cannot be in a vacuum state, and the air pressure inside the furnace tube must be equivalent to atmospheric pressure and maintained at atmospheric pressure.
4. The gas flow rate entering the furnace tube is less than 200sccm to avoid the impact of cold air flow on the furnace tube;
5. When heating the sample, it is recommended to open the exhaust valve and intake valve at the flange end of the furnace tube for use; If it is necessary to close the gas valve to heat the sample, it is necessary to always pay attention to the pressure gauge;
When the pressure index is greater than 0.02Mpa, the exhaust valve/extraction valve (or vacuum pump extraction) must be immediately opened to prevent furnace tube rupture, flange flying out, etc.
